Atlas Copco Showcases Semiconductor Air Solutions at SEMICON India

Atlas Copco is showcasing its advanced compressed air solutions for semiconductor manufacturing at SEMICON India 2026, held in New Delhi from September 17 to 19. The company is emphasizing the critical role that clean, dry, oil-free, and reliable compressed air plays in supporting India's expanding semiconductor fabrication, packaging, and testing ecosystem. In these highly sensitive manufacturing environments, robust utility infrastructure is essential to prevent contamination, moisture, or pressure fluctuations from compromising process integrity, product quality, and overall operational reliability.

At the exhibition, Atlas Copco is displaying an integrated suite of compressed air technologies, including ZH/ZH+ oil-free centrifugal compressors, ZR/ZT screw compressors, and XDG and MDG heat-of-compression dryers. The showcase also features TCX industrial chillers, TDV adiabatic coolers, EH heat pumps, AIRCUBEn pre-engineered compressor rooms, high-efficiency fine filtration systems, and Optimizer 4.0 intelligent controls. Together, these systems deliver a consistent, high-quality air supply from the utility room directly to the point of use, supporting critical applications such as photolithography, purging, cool-down processes, and cleanroom automation.

Additional Context
This section provides technological and market background not explicitly detailed in the original release.

In semiconductor manufacturing, compressed air is a critical utility that must adhere to the stringent ISO 8573-1 Class 0 standard, which mandates that the air be entirely free of oil aerosols and vapors. Even microscopic trace oil contamination from standard lubricated compressors can deposit hydrocarbons onto silicon wafers or optics during photolithography, causing catastrophic defect rates and scrapped production batches. Furthermore, the air must be exceptionally dry—often requiring pressure dew points down to -40°C or -70°C—to prevent moisture from inducing corrosion or disrupting delicate chemical vapor deposition (CVD) processes. By utilizing true oil-free centrifugal and screw compressors paired with advanced heat-of-compression dryers, fabrication plants can achieve this ultra-high purity while mitigating the immense energy costs associated with continuous cleanroom operations. The integration of intelligent master controllers like Optimizer 4.0 further enhances facility efficiency by dynamically matching air generation to the fab's real-time pneumatic demand.

Edited by Lekshman Ramdas, Induportals editor – adapted by AI.

www.atlascopco.com